Gauss Labs Releases AI-Based Virtual Metrology Solution, Panoptes VM 2.0
- New features added in order to improve accuracy and usability
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SK hynix expands adoption ofGauss Labs's solution to etching process in addition to thin film deposition process -
Gauss Labs plans to expand its presence in global industrial AI market with strong references in semiconductor manufacturing
*Metrology: a process of measuring the physical and electrical characteristics to ensure that requirements are met in the manufacturing process
Panoptes VM provides all-wafer measurement data in real-time by predicting process outcomes from sensor data. By applying this solution, it is possible to predict the process results of all products without physical full-scale measurement, significantly reducing time and resources.
*Thin film deposition: the process of creating and depositing thin film coatings onto a substrate material
*APC(Advanced Process Control): a solution that adjusts process condition for equipment adaptively during a manufacturing process
*Variability: the scale of the quality variation of the products from a certain process. It is important to maintain a low process variability in order to keep the product quality consistent.
SK hynix plans to expand the application to APC use case. With the new Multi-Step Modeling feature, it expects to cover the etching process effectively. This new feature creates prediction models using data from not only the current step but also previous steps to improve the accuracy of VM predictions which is especially critical for etching process.
*Etching: the process of removing unnecessary parts on the exterior of the circuit engraved on the wafer through photolithography
Panoptes VM 2.0 also provides the Operation-Group Modeling that allows the users to group data from similar operations for more effective modeling even when the data is scarce and the Automatic Model Selection, which supports multi-algorithm architecture and automatically selects the best performing model based on data characteristics to further improve the accuracy of VM as well as usability.
*MDI(Manufacturing Data Intelligence): extracting valuable information and insights from a vast amount of raw manufacturing data that cannot be easily analyzed by humans
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