Fujifilm to Present Latest Advanced Lithography Research at SPIE Advanced Lithography + Patterning 2026 Conference
As part of its growth strategy aiming to double revenue in the semiconductor materials business to
At SPIE 2026, researchers from
“As a leading supplier of electronic materials to the global semiconductor industry, including AI semiconductors, the advanced resist market provides a unique opportunity for our company and our One-Stop Solution philosophy for customers. Our SPIE presentations will provide attendees with a greater understanding of our capabilities in this area,” says
Specifically, researchers from
Fujifilm Presentation Topics at SPIE 2026
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Feb. 23 , 2:30 p.m.: Development of EUV CAR-NTD process with new organic solvent based-developer for scaling (View abstract, presenter & authors) -
Feb 24 ,2:50 p.m. : Development of spin-coating UV-NIL resist for semiconductor device manufacturing (View abstract, presenter & authors) -
Feb 25 , 4:00 p.m.: Challenges and progress of PFAS alternatives for ArF resist (View abstract, presenter & authors) -
Feb 25 ,5:30 p.m. : Novel EUV photoresists for positive tone development (View abstract, presenter & authors)
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*1 Advanced lithography technology using extreme ultraviolet (EUV) light, necessary for generations with features finer than 10 nanometers.
*2 Nanoimprint lithography. A technology in which a mask (mold) with circuit patterns is pressed onto the resist applied to a semiconductor wafer, like a stamp, to transfer and form the circuit patterns.
*3 PFAS refers to a collective term for perfluoroalkyl compounds, polyfluoroalkyl compounds, and their salts, as defined in the
*4 An exposure method using ArF (argon fluoride) excimer laser light (wavelength 193 nm), which is currently the most widely used advanced lithography technology.
*5 Development solutions, cleaners and other materials used in the photolithography process of semiconductor manufacturing.
*6 A proprietary formulation containing an abrasive that uniformly planarizes semiconductor surface, which contains a mixture of wires and insulation films of varying hardness.
*7 Cleaners used after polishing with CMP slurry to remove particles, minute metal fragments and organic residues while protecting the metal surface.
*8 Materials for forming low-dielectric insulation films.
*9 A material with strong heat resistance and insulation properties, used for forming semiconductors’ protective films and rewiring layers.
*10 High-purity chemicals used in the cleaning and drying processes. The chemicals are employed to remove contaminants during the cleaning and drying stages of semiconductor manufacturing, as well as to eliminate metals and oils during the etching process.
*11 General term referring to a group of functional materials for controlling electromagnetic light waves in a broad range of wavelengths, including photosensitive color materials for manufacturing color filters for image sensors such as CMOS sensors, used in digital cameras and smartphones.
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